F-202AV series > GAS APPLICATION | 나노앤스페이스

MFM / MFC

min: 0,8…40 ln/min
max: 5…250 ln/min

상세정보

기술 정보

Measurement / control system
Flow range (intermediate ranges available)	min. 0,8…40 ln/min max. 5…250 ln/min (based on N2)
정확도 (선형도) (실제 검교정 기반)	± 0,5 % RD plus ±0,1% FS
Repeatability	< 0,2 % RD
Turndown ratio	1:50
Multi fluid capability	Storage of max. 8 calibration curves
Settling time (in control, typical)	2 … 4 seconds
Control stability	≤ ± 0,1 % FS
Operating temperature	-10 … +70 °C
Temperature sensitivity	zero: < 0,05% FS/°C; span: < 0,05% Rd/°C
Pressure sensitivity	< 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
Max. Kv-value	0,04 … 0,4
Leak integrity, outboard	tested < 2 x 10-9 mbar l/s He
Attitude sensitivity	max. error at 90° off horizontal 0,2% at 1 bar, typical N2
Warm-up time	30 min. for optimum accuracy 2 min. for accuracy ± 2% FS

Mechanical parts
Material (wetted parts)	Stainless steel 316L or comparable
Pressure rating (PN)	64 bar abs
Max. ΔP	20 bar(d)
Process connections	compression type or face seal (VCR/VCO) couplings
Seals	standard: FKM/Viton®; options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
Weight	2,1 kg
Ingress protection	IP40

Electrical properties

Power supply

+ 15 … 24 Vdc

Max. power consumption

Supply
15 V
24 V

at voltage I/O
290 mA
200 mA

at current I/O
320 mA
215 mA

extra for fieldbus
<75 mA
<50 mA

아날로그 출력

0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication

standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS

Electrical connection
아날로그/RS232	9-pin D-connector (male);
PROFIBUS DP	bus: 9-pin D-connector (female); power: 9-pin D-connector (male);
CANopen® / DeviceNet™	5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCII	RJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK	2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET	2 x RJ45 modular jack (in/out)

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